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Statistics report
Feb. 2023
Submitted Papers : 80
Accepted Papers : 10
Rejected Papers : 70
Acc. Perc : 12%
Issue Published : 116
Paper Published : 2252
No. of Authors : 6414
  Journal Paper


Paper Title :
A Novel Microfabrication Method For Su-8 Based Pressure Sensor

Author :Payam Heydari, Mehrnaz Esfandiary, Ali Reza Shamsi

Article Citation :Payam Heydari ,Mehrnaz Esfandiary ,Ali Reza Shamsi , (2015 ) " A Novel Microfabrication Method For Su-8 Based Pressure Sensor " , International Journal of Mechanical and Production Engineering (IJMPE) , pp. 35-37, Volume-3,Issue-4

Abstract : This paper describes the novel development of SU-8 based MEMS capacitive pressure sensors. The device is inexpensive, simple to fabricate, lightweight, and accessible. This method is based on photolithography, but does not need an ultra-clean room and high precision mask production equipments. We demonstrated that the proposed pressure sensor can measure pressure with 22 pF/kPa sensitivity. The fabricated micropressure sensor has circular diaphragm with 2.5mm radius and 10µm thickness under silicon substrate. This low-cost device should be useful for applications in public health, environmental monitoring. Keywords- Pressure sensor, SU-8, Microelectromechanical System (MEMS).

Type : Research paper

Published : Volume-3,Issue-4


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