Paper Title :A Novel Microfabrication Method For Su-8 Based Pressure Sensor
Author :Payam Heydari, Mehrnaz Esfandiary, Ali Reza Shamsi
Article Citation :Payam Heydari ,Mehrnaz Esfandiary ,Ali Reza Shamsi ,
(2015 ) " A Novel Microfabrication Method For Su-8 Based Pressure Sensor " ,
International Journal of Mechanical and Production Engineering (IJMPE) ,
pp. 35-37,
Volume-3,Issue-4
Abstract : This paper describes the novel development of SU-8 based MEMS capacitive pressure sensors. The device is
inexpensive, simple to fabricate, lightweight, and accessible. This method is based on photolithography, but does not need an
ultra-clean room and high precision mask production equipments. We demonstrated that the proposed pressure sensor can
measure pressure with 22 pF/kPa sensitivity. The fabricated micropressure sensor has circular diaphragm with 2.5mm radius
and 10µm thickness under silicon substrate. This low-cost device should be useful for applications in public health,
environmental monitoring.
Keywords- Pressure sensor, SU-8, Microelectromechanical System (MEMS).
Type : Research paper
Published : Volume-3,Issue-4
DOIONLINE NO - IJMPE-IRAJ-DOIONLINE-1911
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Copyright: © Institute of Research and Journals
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Published on 2015-04-14 |
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